Amorphous thin film as solid lubricant on a substrate and method

Details Amorphous thin film as solid lubricant on a substrate and method Amorphous thin film as solid lubricant on a substrate and method

1992-09-17

1993-11-30

Pianalto, Bernard

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Web or sheet containing structurally defined element or...

Physical dimension specified

427249, 4272553, 427294, 427527, 427535, 427543, 427563, 427568, 427577, 427578, 427588, 427591, 428688, 428702, B32B 900

Patent

active

052663981

ABSTRACT:
An amorphous thin film as a solid lubricant having a low coefficient of friction. It is composed of silicon (Si), oxygen (O), carbon (C), and hydrogen (H), and has a composition defined by the formula: Si.sub.x (O.sub.m, C.sub.n, H.sub.l-m-n).sub.1-x where, x=0.03-0.02, m=0.05-0.5, =0.1-0.9, and 0.6.ltoreq.m+n.ltoreq.0.95. This thin film exhibits extremely low friction stably from the beginning of sliding. It has superior wear resistance owing to its high hardness.

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