Amorphous silicon ionizing particle detectors

Details Amorphous silicon ionizing particle detectors Amorphous silicon ionizing particle detectors

1986-10-21

1988-11-15

Fields, Carolyn E.

Radiant energy

Invisible radiant energy responsive electric signalling

Semiconductor system

25037001, 25037002, G01T 124

Patent

active

047851864

ABSTRACT:
Amorphous silicon ionizing particle detectors having a hydrogenated amorphous silicon (a--Si:H) thin film deposited via plasma assisted chemical vapor deposition techniques are utilized to detect the presence, position and counting of high energy ionizing particles, such as electrons, x-rays, alpha particles, beta particles and gamma radiation.

REFERENCES:
patent: 4163240 (1979-07-01), Swinehart et al.
patent: 4409605 (1983-10-01), Ovshinsky et al.
patent: 4419578 (1983-12-01), Kress
patent: 4611224 (1986-09-01), Seki et al.

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