Amorphous silicon hermetic coatings for optical wave guides

Details Amorphous silicon hermetic coatings for optical wave guides Amorphous silicon hermetic coatings for optical wave guides

1990-04-02

1993-09-21

King, Roy

Coating processes

Optical element produced

Transparent base

427165, 427163, 4272551, 427255, 4272481, 385130, 385131, B05D 506, C23C 1624, G02B 612

Patent

active

052467341

ABSTRACT:
This invention relates to a method of forming amorphous silicon hermetic coatings on light conducting devices, including optical fibers, wave guides, light pipes, or cables. By the present invention, a halosilane, halodisilane or mixture of halosilanes is thermally decomposed in the vapor phase in the presence of a light conducting device to produce an amorphous silicon hermetic coating on the light conducting device.

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