Amorphous silicon color detector

Details Amorphous silicon color detector Amorphous silicon color detector

1992-03-31

1995-09-12

Mintel, William

Active solid-state devices (e.g., transistors, solid-state diode

Non-single crystal, or recrystallized, semiconductor...

Amorphous semiconductor material

257 54, 257440, 136249, 136255, H01L 2714, H01L 3100

Patent

active

054499232

ABSTRACT:
An amorphous silicon color detector comprising a structure composed of a transparent conductive oxide film (TCO) layer/an a-Si:H layer/a metal layer, of which the a-Si:H layer is an amorphous silicone layer having a thickness greater than 1 .mu.m, and the metal layer is made of a metals selected from the metal group consisting of Cr, Au, Pd, Al, Pt, Mo, Ag or Ti. A depletion region of the color-detector is re-arranged in position and in content thereof according to the absorbencies to different color lights in different bias voltages to achieve the purpose of detecting different color light. An amorphous silicone color image sensor comprises a plurality of the color detectors arranged in linear array incorporated with a scanning device, a processor and an A/D converter to process the signals obtained from scanning. The amorphous silicone color image sensor is especially used in a scanning machine or a fax machine. A manufacture process of the amorphous silicon color detector is also disclosed.

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Tsai et al., "Amorphous SiC/Si three-color detector", Appl. Phys. Lett., vol. 52, No. 4, 25 Jan. 1988, pp. 275-277.
Yang et al., "Four-Color Discriminating Sensor Using Amorphous Silicon Drift-Type Photodiode", Sensors and Actuators, 14, (1988), pp. 69-77.

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