Amorphous pure iron film

Stock material or miscellaneous articles – All metal or with adjacent metals – Composite; i.e. – plural – adjacent – spatially distinct metal...

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428433, 428936, 148403, C23C 1414

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active

051282143

ABSTRACT:
A metal target and a substrate are disposed in confronting relationship in a vacuum chamber whose interior is kept at high vacuum, and laser light is irradiated to the surface of the target to emit a high-speed evaporated material from the target. The high-speed evaporated material is then deposited on the substrate. By applying a predetermined voltage between the target and the substrate, the impact energy of the charged particles in the evaporated material on the substrate are controlled to form an amorphous metal film preferably a pure iron film.

REFERENCES:
patent: 4469536 (1984-09-01), Forester
patent: 4634306 (1987-01-01), Dzuir
patent: 4851296 (1989-07-01), Tenhover et al.
Applied Physics A 47, Nov. 1988, Formation of Dielectric and Semiconductor Thin Films by Laser-Assisted Evaporation, H. Sankur & J. Cheung.

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