Amorphous hard carbon film and mechanical parts coated therewith

Details Amorphous hard carbon film and mechanical parts coated therewith Amorphous hard carbon film and mechanical parts coated therewith

1997-10-23

1999-12-14

Turner, Archene

Stock material or miscellaneous articles

Self-sustaining carbon mass or layer with impregnant or...

428446, 428457, 428698, 427249, 4272551, 4272552, B32B 800

Patent

active

060014806

ABSTRACT:
An amorphous hard carbon film deposited on a substrate wherein the film further contains silicon and nitrogen. A method for deposition of an amorphous hard carbon film containing silicon and nitrogen on a substrate wherein a carbon source, a silicon source and a nitrogen source are introduced in a deposition chamber in which the substrate are placed to deposit the film on said substrate. A mechanical part having a slidable member or slidable members wherein the slidable member(s) is coated with the above amorphous hard carbon film. A method for the use of the above amorphous hard carbon film wherein the film is coated on the surface of a slidable member of a mechanical part.

REFERENCES:
patent: 4783369 (1988-11-01), Sugata et al.
patent: 4869923 (1989-09-01), Yamazaki et al.
patent: 4983993 (1991-01-01), Sugata et al.
patent: 5198285 (1993-03-01), Arai et al.
patent: 5352453 (1994-10-01), Dorfman et al.

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