Amorphous hard carbon film

Details Amorphous hard carbon film Amorphous hard carbon film

1996-12-20

1998-12-01

Turner, Archene

Stock material or miscellaneous articles

Web or sheet containing structurally defined element or...

Physical dimension specified

428408, 428446, 428698, 428704, B32B 400

Patent

active

058435719

ABSTRACT:
An amorphous hard carbon film deposited on a substrate wherein the film further contains silicon and nitrogen. A method for deposition of an amorphous hard carbon film containing silicon and nitrogen on a substrate wherein a carbon source, a silicon source and a nitrogen source are introduced in a deposition chamber in which the substrate are placed to deposit the film on said substrate. A mechanical part having a slidable member or slidable members wherein the slidable member(s) is coated with the above amorphous hard carbon film. A method for the use of the above amorphous hard carbon film wherein the film is coated on the surface of a slidable member of a mechanical part.

REFERENCES:
patent: 4597844 (1986-07-01), Hiraki et al.
patent: 4783368 (1988-11-01), Yamamoto et al.
patent: 4783369 (1988-11-01), Sugat et al.
patent: 4869923 (1989-09-01), Yamazaki
patent: 4983993 (1991-01-01), Sugita et al.
patent: 5198285 (1993-03-01), Arai et al.
patent: 5249554 (1993-10-01), Tamor et al.
patent: 5393577 (1995-02-01), Dearnaley
patent: 5541003 (1996-07-01), Nakayama et al.

Affiliated with

Also associated with

Rating

Amorphous hard carbon film does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Amorphous hard carbon film, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Amorphous hard carbon film will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2394050