Optical: systems and elements – Having significant infrared or ultraviolet property
Patent
1989-09-06
1991-10-29
Arnold, Bruce Y.
Optical: systems and elements
Having significant infrared or ultraviolet property
359507, 359892, G02B 104
Patent
active
050610244
ABSTRACT:
A pellicle comprising a thin, durable film of substantially uniform thickness which absorbs less than 10% light at wavelengths between 190 and 820 nanometers, tautly adhered to one edge of an enclosed support frame, said thin film comprising amorphous fluoropolymers having a refractive index between 1.24 and 1.41. Pellicles of this type are dust defocusing covers for photomasks and reticles used to project patterns onto light sensitive substrates such as photoresist-coated semiconductor wafers which are used in the manufacture of integrated circuits.
REFERENCES:
patent: 4131363 (1978-12-01), Shea et al.
patent: 4378953 (1983-04-01), Winn
patent: 4465759 (1984-08-01), Duly et al.
patent: 4476172 (1984-10-01), Ward
patent: 4482591 (1984-11-01), Ward
patent: 4499231 (1985-02-01), Ward et al.
patent: 4523974 (1985-06-01), Duly et al.
patent: 4536240 (1985-08-01), Winn
patent: 4754009 (1988-06-01), Squire
patent: 4754099 (1988-06-01), Kemp et al.
patent: 4796973 (1989-01-01), Gordon
patent: 4935477 (1990-06-01), Squire
Arnold Bruce Y.
E. I. Du Pont de Nemours and Company
Parsons David R.
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