Amorphous diamond films

Details Amorphous diamond films Amorphous diamond films

1995-09-11

1998-06-09

Turner, Archene

Stock material or miscellaneous articles

Self-sustaining carbon mass or layer with impregnant or...

51307, 51309, 423445R, 428336, 428412, 428457, 428694TC, 428698, 428704, 428446, B24D 302

Patent

active

057630879

ABSTRACT:
Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions.

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patent: 5465603 (1995-11-01), Anthony et al.
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