Amorphous carbon film, process for forming the same, and...

Details Amorphous carbon film, process for forming the same, and... Amorphous carbon film, process for forming the same, and...

2005-11-24

2010-11-16

Speer, Timothy M (Department: 1784)

Stock material or miscellaneous articles

Self-sustaining carbon mass or layer with impregnant or...

C428S446000, C428S688000, C428S689000, C427S577000, C508S109000

Reexamination Certificate

active

07833626

ABSTRACT:
An amorphous carbon film includes carbon as a major component, and silicon in an amount of from 0.1 atomic % or more to 10 atomic % or less when the entire amorphous carbon film is taken as 100 atomic %. The carbon is composed of carbon having an sp2hybrid orbital in an amount of from 60 atomic % or more to 90 atomic % or less when the entire carbon amount is taken as 100 atomic %. Also disclosed is a process for producing the amorphous carbon film.

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