Stock material or miscellaneous articles – Self-sustaining carbon mass or layer with impregnant or...
Reexamination Certificate
2011-02-15
2011-02-15
Turner, Archene (Department: 1784)
Stock material or miscellaneous articles
Self-sustaining carbon mass or layer with impregnant or...
C428S212000, C428S698000
Reexamination Certificate
active
07887919
ABSTRACT:
An amorphous carbon (DLC) film having excellent adhesion at high temperature is provided. An amorphous-carbon-based hard multilayer film, which is formed on a surface of a substrate, includes a base layer formed at a substrate side, a surface layer formed at a surface side, and a compositional gradient layer formed between the base layer and the surface layer, wherein the base layer includes a nitride or a carbo-nitride of an element M expressed by the following formula (1), the surface layer includes an amorphous carbon film containing C of 50 atomic percent or more, and the compositional gradient layer is a layer in which the element M and nitrogen are decreased, and carbon is increased from the base layer to the amorphous carbon film:in-line-formulae description="In-line Formulae" end="lead"?M1-x-yCxNy (1),in-line-formulae description="In-line Formulae" end="tail"?(wherein M is at least one selected from a group 4A element in the periodic table, a group 5A element, a group 6A element, Al, and Si, and x and y denote atomic ratios in the formula, and x is 0.5 or less, y is 0.03 or more, and 1-x-y is more then 0).
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Matsukado Katsuhiro
Yamamoto Kenji
(Kobe Steel, Ltd.)
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Turner Archene
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