Aluminum treatment to prevent hillocking

Details Aluminum treatment to prevent hillocking Aluminum treatment to prevent hillocking

1974-09-30

1976-10-19

Kendall, Ralph S.

Metal treatment

Compositions

Heat treating

427 88, 427343, 156 22, C23F 706

Patent

active

039868974

ABSTRACT:
A method of surface treating aluminum, particularly aluminum metallization for semiconductors, which includes subjecting the aluminum surface to be treated with fuming nitric acid for one to ten minutes at room temperature. Following cleaning, the surface is subjected to boiling water for 5 to 15 minutes. The foregoing treatment appears to form a boehmite (AlO(OH)) layer on the surface of the aluminum, thereby substantially eliminating hillocking.

REFERENCES:
patent: 2859148 (1958-11-01), Attenpohl
patent: 2948392 (1960-08-01), Young
patent: 3247026 (1966-04-01), Switzer
patent: 3380860 (1968-04-01), Lipinski
patent: 3759798 (1973-09-01), Graff et al.

Affiliated with

Also associated with

Rating

Aluminum treatment to prevent hillocking does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Aluminum treatment to prevent hillocking, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Aluminum treatment to prevent hillocking will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-100156