Aluminum oxide-titanium nitride sintered body, manufacturing...

Compositions: ceramic – Ceramic compositions – Refractory

Reexamination Certificate

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Details

C501S105000, C501S096100, C428S813000, C252S520200, C252S520220

Reexamination Certificate

active

07414002

ABSTRACT:
The present invention provides an aluminum oxide-titanium nitride sintered body having good resistance to electrostatic damage and small variation in volume resistivity. The aluminum oxide-titanium nitride sintered body is mainly composed of 65 to 85% by weight of aluminum oxide and titanium nitride constituting the rest. The average of the sum of the crystal grain sizes of the aluminum oxide and the titanium nitride is 0.4 to 2.0 μm. The aluminum oxide has a mean crystal grain size of 0.5 to 2.2 μm and the titanium nitride has a mean crystal grain size of 0.2 to 1.6 μm.

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patent: 2003-018870 (2003-01-01), None

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