Aluminum oxide moisture sensor and related method

Measuring and testing – Gas analysis – Moisture content or vapor pressure

Reexamination Certificate

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C073S029010

Reexamination Certificate

active

06865940

ABSTRACT:
A method of operating an aluminum oxide moisture sensor to measure moisture in a sample gas, where the sensor comprises a pair of electrodes sandwiched about a dielectric, the method comprising: a) heating the sensor to a first temperature above the sample gas temperature and holding the sensor at said first temperature for a first predetermined period of time; b) cooling down the sensor to a second lower temperature over a second predetermined period of time; c) taking plural samples of sensor conductance over a third predetermined period of time at the lower temperature; and d) determining a rate of adsorption of the moisture and using the rate of adsorption as a measure of moisture in the sample gas.

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“Principles of Moisture Measurement,” by E.J. Rosa, Ph.D. (undated).
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