Aluminum nitride substrate and production method

Details Aluminum nitride substrate and production method Aluminum nitride substrate and production method

2005-03-15

2008-03-04

McNeil, Jennifer (Department: 1775)

Stock material or miscellaneous articles

Composite

Of inorganic material

Reexamination Certificate

active

07338723

ABSTRACT:
An aluminum nitride substrate comprises a planar sintered aluminum nitride body containing carbon including free carbon and a substantially planar electrode buried in the sintered aluminum nitride body. The sintered aluminum nitride body includes a work mounting portion for placing a work thereon and a base layer having the electrode buried therein. The average concentration of free carbon in the work mounting portion different from the average concentration of free carbon in the base layer.

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