Aluminum nitride substrate and process for preparation thereof

Details Aluminum nitride substrate and process for preparation thereof Aluminum nitride substrate and process for preparation thereof

1996-02-06

1998-11-03

Turner, Archene

Stock material or miscellaneous articles

Web or sheet containing structurally defined element or...

Physical dimension specified

428697, 428698, 428701, 428702, 264 56, 264 60, 264 61, 264 62, 4271263, 501 961, 501 984, 501152, 501153, L04B 4187

Patent

active

058305700

ABSTRACT:
An aluminum nitride substrate composed of a sintered body base material composed mainly of aluminum nitride and an aluminum oxide layer formed on the surface of the base material, wherein at least one of the base material and the aluminum oxide layer contains at least one member selected from the group consisting of single substances, carbidies, nitrides, borides and oxides of Ti, V, Nb, Mo, W, Co and Ni. This aluminum oxide layer is formed by an oxidizing treatment of the base material, and a metal conductor layer is formed on this aluminum oxide layer. This substrate has a very high allusion to the metal conductor layer.

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