Aluminum nitride sintered compact

Details Aluminum nitride sintered compact Aluminum nitride sintered compact

2003-09-17

2008-01-15

Group, Karl E (Department: 1755)

Compositions: ceramic

Ceramic compositions

Refractory

C501S098500

Reexamination Certificate

active

07319080

ABSTRACT:
An aluminum nitride sintered body comprising crystal grains of an average grain size (D50) of 0.1 to 2.5 μm, and having a pore area ratio of not larger than 1×10−7, a pore density of not larger than 0.05 pores/mm2of pores having diameters of not smaller than 1 μm, and a Vickers' hardness in a range of 14 to 17 GPa. The aluminum nitride sintered body has a very small pore density despite of its relatively small crystal grain size, features excellent strength and mirror machinability, and is particularly useful as a material for circuit substrates on which fine wiring patterns are formed.

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