Aluminum nitride sintered body, metal including member, electros

Details Aluminum nitride sintered body, metal including member, electros Aluminum nitride sintered body, metal including member, electros

1996-11-01

1999-12-07

Marcheschi, Michael

Compositions: ceramic

Ceramic compositions

Refractory

501153, C04B 35581

Patent

active

059983205

ABSTRACT:
An aluminum nitride sintered body has characteristics such that an amount of total metal elements other than aluminum is smaller than 100 ppm, and a volume resistivity at room temperature is greater than 1.0.times.10.sup.9 .OMEGA..multidot.cm and is smaller than 1.0.times.10.sup.13 .OMEGA..multidot.cm. A metal including member has such a construction that a metal member is embedded in the aluminum nitride sintered body mentioned above. An electrostatic chuck is made by the metal including member mentioned above. In the metal including member mentioned above in which the metal member is embedded in the aluminum nitride sintered body mentioned above, a volume resistivity thereof can be controlled without adding a low resistance material in aluminum nitride.

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Database WPI, Week 9628, Derwent Publications Ltd., London, GB; AN 96-271230, SP002037205 & JP 07 226 431 A (Kyocera Corp.), Aug. 22, 1995, *abstract*.
Chemical Abstracts, vol. 109, No. 4, Jul. 25, 1988, Columbus, Ohio, US; abstract No. 26718, T. Mimori et al.: XP002037204 *abstract* & JP 63 085 055 A (Asahi Glass Co., Ltd.).
Patent Abstracts of Japan, vol. 012, No. 330 (E-655), Sep. 7, 1988 & JP 63 095644 A (Nippon Telegr. & Teleph. Corp. (NTT)), Apr. 26, 1988, *abstract* .

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