Aluminum nitride sintered body, electronic functional material,

Details Aluminum nitride sintered body, electronic functional material, Aluminum nitride sintered body, electronic functional material,

1998-09-14

1999-12-07

Marcheschi, Michael

Compositions: ceramic

Ceramic compositions

Refractory

501152, 279128, C04B 35581

Patent

active

059983213

ABSTRACT:
This invention relates to an aluminum nitride sintered body comprising aluminum nitride crystal grains, in which the grains have a given content of a rare earth element (a conversion content as an oxide thereof), a given average grain size, and a given spin amount per unit mg of aluminum obtained from a spectrum as measured by an electron spin resonance method. The aluminum nitride sintered body is used in an electronic functional material and an electrostatic chuck.

REFERENCES:
patent: 4711861 (1987-12-01), Sawamura et al.
patent: 5085923 (1992-02-01), Yamakawa et al.
patent: 5393715 (1995-02-01), Nakahata et al.
patent: 5413360 (1995-05-01), Atari et al.

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