Aluminum nitride sintered body

Compositions: ceramic – Ceramic compositions – Refractory

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C219S553000

Reexamination Certificate

active

07341969

ABSTRACT:
The object of the present invention is to provide a susceptor with superior thermal uniformity by minimizing pores in an aluminum nitride sintered body.In an aluminum nitride sintered body according to the present invention, the tin content and sulfur content are controlled so that they are no more than a fixed amount. More specifically, in an aluminum nitride sintered body having as its main component aluminum nitride, the tin content in the aluminum nitride sintered body is no more than 50 ppm and the sulfur content is no more than 100 ppm. It would be preferable for a resistance heating body to be formed in the aluminum nitride sintered body and it would be preferable for the aluminum nitride sintered body to be used as a semiconductor heating unit.

REFERENCES:
patent: 5998320 (1999-12-01), Yamada et al.
patent: 6486085 (2002-11-01), Katsuda et al.
patent: 6800576 (2004-10-01), Katsuda et al.
patent: 7081425 (2006-07-01), Kanechika et al.
patent: 2-26871 (1990-01-01), None
patent: 11-074064 (1999-03-01), None
patent: 2003292377 (2003-10-01), None
patent: 2005119953 (2005-05-01), None
Patent Abstracts of Japan for JP11-074064 published Mar. 16, 1999.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Aluminum nitride sintered body does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Aluminum nitride sintered body, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Aluminum nitride sintered body will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3963239

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.