Aluminum nitride ceramics, members for use in a system for...

Compositions: ceramic – Ceramic compositions – Refractory

Reexamination Certificate

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C501S098600, C501S096400, C252S508000

Reexamination Certificate

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06884742

ABSTRACT:
An aluminum nitride ceramic is provided, containing boron atoms in an amount of not lower than 1.0 weight percent and carbon atoms in an amount of not lower than 0.3 weight percent and having a volume resistivity at room temperature of not higher than 1×1012Ω·cm. The aluminum ceramic comprises aluminum nitride and an intergranular phase mainly consisting of boron nitride constituting a conductive path. Such a ceramic may be obtained by holding a mixture containing at least aluminum nitride and boron carbide at a holding temperature in a range of 1400° C. to 1800° C. and then sintering the mixture at a maximum temperature that is higher than the holding temperature.

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