Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1981-10-26
1984-07-17
Childs, Sadie L.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
156643, 156646, 427 88, 427 91, 427252, 427255, 427299, B05D 306, C23C 1100
Patent
active
044606184
ABSTRACT:
Aluminum conductor tracks are formed e.g. on a semiconductor body by vapor depositing a layer of aluminum from tri-isobutyl aluminum and then selectively etching the routing. The surface of the semiconductor body is activated in a hydrogen discharge in the presence of a transport metal.
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Hiler et al., "Development of a Method to Accomplish Aluminum Deposition by Gas Plating,"0 WADC Tech. Report, pp. 13, 20, 24 & 25, Jun. 1959.
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Heinecke Rudolf A. H.
Stern Ronald C.
Childs Sadie L.
IT&T Industries, Inc.
Raden James B.
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