Aluminum circuit to be disconnected and method of cutting the sa

Details Aluminum circuit to be disconnected and method of cutting the sa Aluminum circuit to be disconnected and method of cutting the sa

1987-06-15

1988-02-02

Albritton, C. L.

Electric heating

Metal heating

By arc

219121LJ, B23K 2600

Patent

active

047230622

ABSTRACT:
In order to cut a portion of an aluminum interconnection in an aluminum circuit to be disconnected, the aluminum interconnection portion in the region to be cut is covered with a hydrogen-containing silicon nitride film by plasma CVD and is then irradiated with laser beams in an operating sequence consisting of three steps: the first step with relatively low power intensity and long irradiation time duration, the second step with intermediate power intensity and short irradiation time duration and the third step with relatively high power intensity and shortest irradiation time duration.

REFERENCES:
patent: 4217570 (1980-08-01), Holmes
patent: 4259367 (1981-03-01), Dougherty, Jr.
patent: 4288776 (1981-09-01), Holmes
patent: 4344064 (1982-08-01), Bitler et al.
B. K. Aggarwal, et al. IBM Technical Disclosure Bulletin, "Laser Cutting Metal Through Quartz," vol. 22, No. 5, pp. 1971-1972, Oct. 1979.

Affiliated with

Also associated with

Rating

Aluminum circuit to be disconnected and method of cutting the sa does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Aluminum circuit to be disconnected and method of cutting the sa, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Aluminum circuit to be disconnected and method of cutting the sa will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1636907