Aluminum based alloy bridge structure and method of forming same

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means

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438619, 438688, 438687, H01L 2358

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active

060752785

ABSTRACT:
A bridge structure, such as an air bridge, includes a bridge element formed of an alloy including aluminum, copper, and lithium. The alloy may also further include silicon and the amount of lithium of the alloy is generally greater than about 1.0% by weight up to the maximum solubility limit of lithium in aluminum. Methods for forming bridge structures utilizing such an alloy are also described.

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