Alumina sintered product

Details Alumina sintered product Alumina sintered product

1995-04-19

1998-11-03

Bonner, Melissa

Compositions: ceramic

Ceramic compositions

Aluminum compound containing

501127, C04B 3510

Patent

active

058308199

ABSTRACT:
An aluminous sintered product comprising 70 to 96% by weight of an alumina component and 4 to 30% by weight of additives, said additives including at least the one selected from oxides of elements of the Group 5a of periodic table and at least the one selected from oxides of metals of the iron family and oxides of manganese, titanium, calcium, magnesium, chromium and silica, and said aluminous sintered product exhibiting a volume resistivity of from 1.times.10.sup.7 to 1.times.10.sup.13 .OMEGA.-cm over a temperature range of from 25.degree. to 75.degree. C. and an absolute value of the temperature coefficient of volume resistivity of not larger than 1.8%/.degree.C. under the application of high voltages. The sintered product is used as antistatic part such as conveyer arm, handling jig, tweezers for holding wafers and the like that must not be electrostatically charged in an apparatus for producing semiconductors, and as resistance substrate, electrically conducting material, contact, heater, part in vacuum tubes, and part for electron guns in a CRT such as of TVs and the like.

REFERENCES:
patent: 3791833 (1974-02-01), Sugiura et al.
patent: 4866016 (1989-09-01), Ando et al.

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