Alternative pixel shapes for uncooled microbolometers

Details Alternative pixel shapes for uncooled microbolometers Alternative pixel shapes for uncooled microbolometers

2005-10-18

2005-10-18

Porta, David (Department: 2878)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

C250S332000

Reexamination Certificate

active

06956213

ABSTRACT:
An infrared (IR) imaging system in accordance with the present invention includes a substrate, a plurality of disc-shaped microbolometer pixels that combined to define a Focal Plane Array. Each pixel is electrically connected to the substrate with a pair of opposing helical isolation legs. One end of the isolation leg is attached to the pixels periphery while the other is fixed to that substrate so that the FPA and a plane containing the substrate have a parallel, spaced-apart relationship. In this manner, the isolation leg(s) provides an electrical communication path from each pixel to the substrate as each pixel undergoes an internal change in resistance due to absorption of IR energy. At the same time, the legs separate the pixels from the substrate so that there is no heat transfer between the pixel and the substrate due to direct contact. The disc shape arrangement allows for a staggered arrangement of adjacent rows in the array, thereby increasing the fill factor for the FPA of the device.

REFERENCES:
patent: 6121603 (2000-09-01), Hang et al.
patent: 6841768 (2005-01-01), Moon et al.
patent: 2004/0200961 (2004-10-01), Parrish et al.

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