Alternating pulse dual-beam apparatus, methods and systems...

Details Alternating pulse dual-beam apparatus, methods and systems... Alternating pulse dual-beam apparatus, methods and systems...

2005-06-14

2005-06-14

Patel, Paresh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C250S310000

Reexamination Certificate

active

06906538

ABSTRACT:
Voltage contrast-based apparatuses, methods and systems for detection of continuity are described for use in evaluation of conducting components of a microcircuit such as a silicon wafer-based semiconductor chip. Two beams are directed to two separate conducting, electrically floating components on the sample, and are timed and delivered to be alternating pulses. One lower energy beam elicits its target to emit secondary electrons that are detected by an electron detector to produce an image. A second high-energy beam creates a virtual ground at its target. Voltage contrast images indicate whether there is continuity between the two conducting components.

REFERENCES:
patent: 4417203 (1983-11-01), Pfeiffer et al.
patent: 6038018 (2000-03-01), Yamazaki et al.
patent: 6091249 (2000-07-01), Talbot et al.

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