Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing
Reexamination Certificate
2003-11-12
2008-01-22
McPherson, John A. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Registration or layout process other than color proofing
C430S313000, C430S311000
Reexamination Certificate
active
07320847
ABSTRACT:
A device manufacturing method capable of imaging structures on one side of a substrate aligned to markers on the other side, is presented herein. One embodiment of the present invention comprises providing a first substrate having first and second surfaces, patterning the first surface of the substrate with at least one reversed alignment marker, providing a protective layer over the alignment marker, and bonding the first surface of the first substrate to a second substrate. The embodiment further includes locally etching the first substrate as far as the protective layer to form a trench around the reversed alignment marker, and forming at least one patterned layer on the second surface using a lithographic projection apparatus having a front-to-backside alignment system while aligning the substrate to the alignment markers revealed in each trench.
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European Search Report for EP 03 25 7168 completed Mar. 29, 2004.
Best Keith Frank
Consolini Joseph J.
Friz Alexander
ASML Netherlands B.V.
Chacko-Davis Daborah
McPherson John A.
Pillsbury Winthrop Shaw & Pittman LLP
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