Altering temporal response of microelectromechanical elements

Details Altering temporal response of microelectromechanical elements Altering temporal response of microelectromechanical elements

2006-10-10

2006-10-10

Lester, Evelyn A (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S224200, C359S290000, C359S291000, C359S298000, C359S846000, C359S849000

Reexamination Certificate

active

07119945

ABSTRACT:
An array of movable elements is arranged on a substrate. Each element has a cavity and a movable member to move through the cavity. The pressure resistance of the elements varies, allowing actuation signals to be manipulated to activate elements with different pressure resistance at different levels of the actuation signal.

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