Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2011-05-03
2011-05-03
Glick, Edward J (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S052000
Reexamination Certificate
active
07936445
ABSTRACT:
A system and method are used to compensate for distortions or aberrations in an image formed in a projection system. Pattern data is generated corresponding to features to be formed on a substrate. At least one of aberrations and distortions of a projection optical system are measured. The pattern data is altered based on the measuring step. The altered pattern data is transmitted to a patterning device to control individually controllable elements coupled to the patterning device. Non uniformities in one or both of a field and pupil of an illumination system can also be measured and used to alter the pattern data.
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Cebuhar Wenceslao A.
Hintersteiner Jason D.
Tinnemans Patricius Aloysius Jacobus
Aslaw Mesfin T
ASML Holding N.V.
ASML Netherlands B.V.
Glick Edward J
Sterne, Kessler, Goldstein & Fox P.L.L.C
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