Altering flow of gaseous substances

Details Altering flow of gaseous substances Altering flow of gaseous substances

1985-09-24

1987-01-13

Schwadron, Martin P.

Fluid handling

Systems

Multi-way valve unit

251 65, 251368, F16K 11044, F16K 11048, F16K 3106

Patent

active

046356819

ABSTRACT:
A system is described enabling the flow of gaseous substances to be altered or switched from one line to another as desired without need for lubricants or having parts in continuous frictional contact with each other. In essence, the system is composed of (a) a first chamber having a gas entry port, and a pair of gas exit ports; (b) a second chamber adapted to receive gas flowing through one of the exit ports, and additionally having a gas discharge port and a separate gas inlet port to receive another flow of gas; (c) a third chamber adapted to receive gas flowing through the other of the exit ports, and additionally having a gas discharge port and a separate gas inlet port to receive another flow of gas; and (d) an internal valve for alternatively sealing off one or the other of the gas exit ports. Preferably, the valve is magnetically actuated by means of a sub-system which is itself pneumatically actuated. The advantage of using the system in MOCVD are described.

REFERENCES:
patent: 132497 (1872-11-01), Spooner
patent: 3065366 (1962-11-01), Speiser et al.
patent: 3134395 (1964-05-01), Glasgow
patent: 3202170 (1965-08-01), Holbrook
patent: 3212751 (1965-11-01), Hassa

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