AlN sintered body having high thermal conductivity and a method

Details AlN sintered body having high thermal conductivity and a method AlN sintered body having high thermal conductivity and a method

1988-01-11

1989-07-11

Dixon, Jr., William R.

Compositions: ceramic

Ceramic compositions

Refractory

501 96, 501153, C04B 3558

Patent

active

048472212

ABSTRACT:
According to the present invention, there is provided an aluminum nitride sintered body having a high thermal conductivity and essentially consisting of a AlN single-phase, containing 0.01 to 8,000 ppm of rare earth elements and less than 2,000 ppm of oxygen. According to the present invention, there is provided a method of fabricating an aluminum nitride sintered body having a high thermal conductivity and essentially consisting of AlN single-phase, containing 0.01 to 8,000 ppm of rare earth elements and less than 2,000 ppm of oxygen, wherein a molded body prepared by mixing and molding an aluminum nitride power having less than 7 wt % of oxygen and an average particle size of 0.05 to 5 .mu.m and with rare earth compounds of 0.01 to 15 wt % of based on rare earth elements content, or a sintered AlN body containing oxide grain boundary phases of 0.01 to 15 wt % of rare earth elements and 0.01 to 20 wt % of oxygen and (rare earth element)--Al--O compounds phases and/or (rare earth element)--O compounds phases, is fired in a reducing atmosphere at a temperature of 1,550 to 2,050.degree. C. for 4 hours or more.

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Iwase et al, "Developement of High Thermal Conductive AlN Ceramic Substrate Terminology", IMC Procedings, Tokyo, May 21-23, 1984 pp. 180-185.
Slack, "Nonmetallic Crystals with High Thermal Conductivity", J. Phys. & Chem. Solids, 34, pp. 321-335, 1973.

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