ALN material and electrostatic chuck incorporating same

Details ALN material and electrostatic chuck incorporating same ALN material and electrostatic chuck incorporating same

2006-01-03

2006-01-03

Stein, Stephen (Department: 1775)

Stock material or miscellaneous articles

Composite

Of inorganic material

C428S469000, C428S702000, C279S128000, C501S098500

Reexamination Certificate

active

06982125

ABSTRACT:
An electrostatic chuck is provided which includes a ceramic body comprising aluminum nitride (AlN), and at least one electrode in the ceramic body. According to a particular feature of this embodiment, the aluminum nitride has a resistivity ratio ρ10V/ρ500Vless than about 5. In this regard, ρ10Vrepresents the resistivity of the electrostatic chuck at 10 applied volts while ρ500Vrepresents the resistivity of the AlN material at 500 applied volts.

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