Metal treatment – Compositions – Heat treating
Patent
1984-05-16
1985-06-25
Roy, Upendra
Metal treatment
Compositions
Heat treating
29576B, 29576T, 148187, 357 67, 357 91, H01L 2124
Patent
active
045252211
ABSTRACT:
An improvement in the rapid alloying of aluminum metallization on a silicon substrate is provided. The structure is heated to alloying temperature for under a minute in a suitable heating means in a reducing atmosphere and rapidly cooled to under 200.degree. C. in not longer than about one minute after cessation of heating. A preferred reducing atmosphere is forming gas.
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AG Associates: Heatpulse Rapid Heating System Information Brochure.
Morris B. E.
RCA Corporation
Roy Upendra
Swope R. H.
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