All surface data for use in substrate inspection

Details All surface data for use in substrate inspection All surface data for use in substrate inspection

2009-09-09

2010-11-16

Ge, Yuzhen (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

Reexamination Certificate

active

07835566

ABSTRACT:
A system for capturing, calibrating and concatenating all-surface inspection and metrology data is herein disclosed. Uses of such data are also disclosed.

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PCT Search Report mailed Nov. 6, 2007; 13 pages.

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