All-silicon capacitive pressure sensor

Details All-silicon capacitive pressure sensor All-silicon capacitive pressure sensor

1997-08-27

1999-08-10

Oen, William

Measuring and testing

Fluid pressure gauge

Diaphragm

G01L 912

Patent

active

059361646

ABSTRACT:
An all-silicon monolithic capacitive absolute pressure-sensing device and method for making the same. The device employs a single-crystal silicon diaphragm that serves at a flexible capacitor plate of a variable capacitor. The diaphragm is bonded to a single-crystal silicon wafer to overlie a cavity etched into the wafer. A fixed capacitor plate of the variable capacitor is formed by a heavily-doped region at the bottom of the cavity. A thin dielectric layer is grown on the fixed capacitor plate to complete the capacitor. The cavity has a minimal depth such that the fixed capacitor plate provides overpressure protection for the diaphragm. At least a portion of the operating range of the pressure sensor occurs while the diaphragm is contacting the doped region. As a result, the capacitive output signal of the pressure sensor is produced by changes in contact area between the diaphragm and a thin dielectric situated on the doped region in response to pressure applied to the diaphragm.

REFERENCES:
patent: 4530029 (1985-07-01), Beristain
patent: 4578735 (1986-03-01), Knecht et al.
patent: 4949581 (1990-08-01), Rud, Jr.
patent: 5245504 (1993-09-01), Bullis et al.
patent: 5344523 (1994-09-01), Fung et al.
patent: 5490034 (1996-02-01), Zavracky et al.
patent: 5528452 (1996-06-01), Ko

Affiliated with

Also associated with

Rating

All-silicon capacitive pressure sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with All-silicon capacitive pressure sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and All-silicon capacitive pressure sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1121839