All electrostatic electron optical sub-system for variable elect

Details All electrostatic electron optical sub-system for variable elect All electrostatic electron optical sub-system for variable elect

1985-06-28

1987-07-28

Albritton, C. L.

Electric heating

Metal heating

By arc

219121ES, 2504911, B23K 1500

Patent

active

046833668

ABSTRACT:
An all-electrostatic variable spot charged particle (electron) beam shaping sub-system which is compact and of much smaller size than known similar systems designed for the same purpose and operating with magnetic lenses. The improved electrostatic variable spot-shaping sub-system does not require mechanical rotation of the spot-shaping apertures for maintaining alignment or orientation. The improved sub-system includes both beam steering and beam blanking requiring less than 3 volts for operation of the blanking controls to turn the beam on and off. The novel system easily accomodates a variety of different beam-shaping apertures for use as the second beam shaping aperture in the sub-system including rectilinear triangles of different orientation to provide smooth 45 degree pattern delineation, rectangles, squares, and even different diameter circles where such configurations are required by a particular pattern to be written in the target plane.

REFERENCES:
patent: 4423305 (1983-12-01), Pfeiffer
patent: 4430570 (1984-02-01), Takigawa et al.

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