Compositions: coating or plastic – Coating or plastic compositions – Heavy metal compound containing
Patent
1997-11-20
1999-06-29
Lovering, Richard D.
Compositions: coating or plastic
Coating or plastic compositions
Heavy metal compound containing
10628717, 10628719, 25218212, 252364, 423DIG14, 4272481, C09K 300, C23C 1640
Patent
active
059163593
ABSTRACT:
A solvent composition useful for liquid delivery chemical vapor deposition of organometallic precursors such as .beta.-diketonate metal precursors. The solvent composition comprises a mixture of solvent species A, B and C in the proportion A:B:C wherein A is from about 3 to about 7 parts by volume, B is from about 2 to about 6 parts by volume, and C is from 0 to about 3 parts by volume, wherein A is a C.sub.6 -C.sub.8 alkane, B is a C.sub.8 -C.sub.12 alkane, and C is a glyme-based solvent (glyme, diglyme, tetraglyme, etc.) or a polyamine. The particular solvent composition including octane, decane and polyamine in an approximate 5:4:1 weight ratio is particularly usefully employed in the formation of SrBi.sub.2 Ta.sub.2 O.sub.9 films.
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Baum Thomas H.
Bhandari Gautam
Advanced Technology & Materials Inc.
Hultquist Steven J.
Lovering Richard D.
Zitzmann Oliver A.M.
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