Alkali-soluble siloxane polymer, silmethylene polymer, and polyo

Details Alkali-soluble siloxane polymer, silmethylene polymer, and polyo Alkali-soluble siloxane polymer, silmethylene polymer, and polyo

1986-05-05

1988-05-17

Marquis, Melvin I.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From silicon reactant having at least one...

528 14, 528 37, 528 21, 528 23, 528 25, 556431, 556449, 556450, C08G 7700

Patent

active

047451696

ABSTRACT:
There are provided an alkali-soluble siloxane polymer, an alkali-soluble silmethylene polymer, and an alkali-soluble polyorganosilsesquioxane polymer. They are useful as a photoresist for the fabrication of semiconductor devices. They are suitable for dry etching because of their superior resistance to oxygen plasmas.

REFERENCES:
patent: 3328450 (1967-06-01), Plueddemann
patent: 3837897 (1974-09-01), Marzocchi
patent: 4626556 (1986-12-01), Nozue et al.
Hackh's Chemical Dictionary, 4th Ed., 1972, p. 87.

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