Alkali-soluble organopolysiloxane

Details Alkali-soluble organopolysiloxane Alkali-soluble organopolysiloxane

1989-05-11

1990-08-07

Marquis, Melvyn I.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From silicon reactant having at least one...

528 12, 528 43, 556453, 556455, C08G 7700

Patent

active

049469215

ABSTRACT:
Alkali-soluble organopolysiloxanes useful in the alkali-developing resist materials for use in microprocesses in LSI device fabrication have the following general formula ##STR1## where A is a hydroxyphenyl group; R is an alkylene group having 1 to 4 carbon atoms; n is zero or one; R.sup.1 is an alkyl group having 1 to 4 carbon atoms; x and z are positive numbers; y is zero or a positive number; x, y, and z have values such that their ratios are 0.3.ltoreq.(x+y)/z.ltoreq.4; and zero.ltoreq.y/x.ltoreq.5.

REFERENCES:
patent: 4745169 (1988-05-01), Sugiyama et al.
patent: 4855381 (1989-08-01), Mutoh et al.

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