Alignment verification system for use with interferometer and ha

Details Alignment verification system for use with interferometer and ha Alignment verification system for use with interferometer and ha

1994-07-22

1995-11-28

Turner, Samuel A.

Optics: measuring and testing

By polarized light examination

With birefringent element

356359, G01B 902

Patent

active

054713056

ABSTRACT:
An alignment verification system for adjusting the posture of a test piece on a support table into alignment with a reference plate on an interferometer containing a light source to irradiate the test piece and reference plate, the verification system including: a bi-axial adjustment means for tilting the support table in the directions of perpendicularly intersecting X- and Y-axis; spot image forming means arranged to converge light reflections from a master surface of the reference plate and an inspecting surface of the test piece into spot images of a predetermined diameter at a predetermined spot image-forming plane; a line sensor located at the spot image-forming plane across the spot image of the reference plate and having a linear light receiving face switchable through 90.degree. between an X-axis position and a Y-axis position corresponding to the directions of the X- and Y-axes of the bi-axial adjustment means, for detecting the spot image of the test piece in relation with tilting adjustments of the support table by the bi-axial adjustment mechanism in each of the X- and Y-axis positions; and a sensor drive mechanism adapted to switch the light receiving face of the line sensor from the X-axis position to the Y-axis position or vice versa upon detecting the spot image of the test piece in one of the X- and Y-axis positions.

REFERENCES:
patent: 4201473 (1980-05-01), Domenicali et al.
patent: 5054925 (1991-10-01), Hunter

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