Alignment using latent images

Details Alignment using latent images Alignment using latent images

2007-07-17

2007-07-17

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S077000

Reexamination Certificate

active

10895651

ABSTRACT:
Systems and techniques for alignment with latent images. In one implementation, a method includes detecting a location of a latent image on a substrate, repositioning the substrate based on the detected location of the latent image, and patterning the substrate.

REFERENCES:
patent: 5140366 (1992-08-01), Shiozawa et al.
patent: 5160957 (1992-11-01), Ina et al.
patent: 5262822 (1993-11-01), Kosugi et al.
patent: 6097473 (2000-08-01), Ota et al.
patent: 6118577 (2000-09-01), Sweatt et al.
patent: 6458605 (2002-10-01), Stirton
patent: 6498640 (2002-12-01), Ziger
patent: 2001/0019412 (2001-09-01), David
patent: 2002/0080364 (2002-06-01), Monshouwer et al.
patent: 2003/0064307 (2003-04-01), Nakamura et al.
Huang, H., et al., “Scatterometry-Based Overlay Metrology”,Proc. SPIE, Metrology, Inspection, and Process Control for Microlithography XVII, Feb. 2003, pp. 1-12, vol. 5038 (paper 5038-132), SPIE, Santa Clara, California.
Niu, X., et al., “Specular Spectroscopic Scatterometry in DUV Lithography”,Proc. SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Mar. 1999, pp. 159-168, vol. 3677, SPIE, Santa Clara, California.
Cho, Hyungsuck, Ed.,Opto-Mechatronic Systems Handbook: Techniques and Applications, CRC Press LLC, pp. 17-13 and 17-14 (2003).
Rees, W.G.,Physical Principles of Remote Sensing, 2ndEd, Cambridge University Press, pp. 217-222 (2001).

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