Radiant energy – Means to align or position an object relative to a source or...
Patent
1983-06-30
1985-10-08
Anderson, Bruce C.
Radiant energy
Means to align or position an object relative to a source or...
219121EW, H01J 3700
Patent
active
045462607
ABSTRACT:
An alignment system for registration of a scanning beam in a mask inspection tool. Minimum scan widths (W) in the registration process are attained thereby increasing registration sensitivity. This technique allows initial placement of the E-Beam to be outside the capture range so that the scan on one side is completely off the metal (on glass) and the scan on the other side is completely on the metal. Correction signals are obtained by comparing the backscattered electron signals from the two scans with the magnitude of the signal being indicative of the amount of correction required and the sign being indicative of the direction of correction.
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Simpson Robert A.
Trotter Ralph R.
Weber Edward V.
Anderson Bruce C.
International Business Machines - Corporation
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