Alignment system for a spherical shaped device

Details Alignment system for a spherical shaped device Alignment system for a spherical shaped device

1999-07-09

2000-10-24

Bowers, Charles

Semiconductor device manufacturing: process

With measuring or testing

257618, H01L 2166, H01L 2906

Patent

active

06136617&

ABSTRACT:
A processing apparatus and method for positioning a device, in particular a spherical-shaped semiconductor device, is disclosed. The device to be processed is contained in a carrier fluid which is used to control the movement of the device. A physical deformity, previously induced onto the device, causes the device to align itself in a calculable manner within the fluid so as to reduce drag. The location and particular shape of the deformity define the specific alignment the device will achieve. Once roughly aligned, a plurality of energy sources project device shadows upon sensors that are sensitive to the energy source being used. The information acquired by the sensors is then used to calculate the position of the device.

REFERENCES:
patent: 5955776 (1999-09-01), Ishikawa
Application No. 08/858,000, filed May 16, 1997, entitled: Spherical Shaped Semiconductor Integrated Circuit by Akira Ishikawa, copy of first page of specification, abstract and figure No. one (Attorney Docket No. 22397.3.02).
Application No. 09/066,222, filed Apr. 24, 1998, entitled: Touchless Stabilizer for Processing Spherical Shaped Devices by Ramesh Kasim and Ram Ramamurthi, copy of first page of specification, abastract and figure No. one (Attorney Docket No. 22397.65).

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