Photocopying – Projection printing and copying cameras – Identifying – composing – or selecting
Reexamination Certificate
2007-08-21
2007-08-21
Fuller, Rodney (Department: 2851)
Photocopying
Projection printing and copying cameras
Identifying, composing, or selecting
C355S053000, C355S077000
Reexamination Certificate
active
10845516
ABSTRACT:
An arrangement for and a method of automatically selecting substrate alignment marks on a substrate in a lithographic apparatus or overlay metrology targets in an overlay metrology apparatus. The apparatus has a processor and a memory connected to the processor. The memory stores locations of one or more sets of substrate alignment marks or overlay metrology targets available for selection and selection rules to select suitable substrate alignment marks or overlay metrology targets from this at least one set. The selection rules are based on experimental or theoretical knowledge about which substrate alignment mark or overlay metrology targets locations are optimal in dependence on one or more selection criteria.
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patent: 6963389 (2005-11-01), Fukada
patent: 98/39689 (1998-09-01), None
Christopher J. Gould, et al., “Advanced process control applied to metal layer overlay process”, Data Analysis and Modeling for Process Control, Proc. of SPIE, vol. 5378, pp. 28-37 (Jan. 2004).
Bogers Roland Adrianus Emanuel Maria
Edart Remi Daniel Marie
Hulshof Bernardus Johannes Antonius
Koren Ramon Navarro Y
Lam Pui Leng
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
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