Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-12-19
2006-12-19
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000
Reexamination Certificate
active
07151591
ABSTRACT:
A system and a method for aligning two devices with respect to each other are presented. A first device is provided with a proximity switch and the second device is provided with a reference mark. When the second device enters a detection area of the proximity switch, a first state of the proximity switch changes to a second state, thus indicating a position of the second device with respect to the proximity switch. When the position of the second device is known with respect to the proximity switch, the devices may be positioned to a desired position with respect to each other. The proximity switch may be used to determine the position of the other device in a number of directions. Both the position and the orientation of the first device with respect to the second device may be determined using the proximity switch.
REFERENCES:
patent: 4307961 (1981-12-01), Blitchington et al.
patent: 4958982 (1990-09-01), Champet et al.
patent: 5798651 (1998-08-01), Aruga et al.
patent: 5883703 (1999-03-01), Knirck et al.
patent: 6098484 (2000-08-01), Bacchi et al.
patent: 6659116 (2003-12-01), Williams et al.
patent: 2003243473 (2003-08-01), None
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Rutledge D.
LandOfFree
Alignment system, alignment method, and lithographic apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Alignment system, alignment method, and lithographic apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Alignment system, alignment method, and lithographic apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3703132