Alignment stage device

Details Alignment stage device Alignment stage device

1989-02-03

1990-08-14

Brown, David H.

Material or article handling

Load carried along a horizontal linear path

Carried via magnetic floating

414743, 350531, 269 73, B65G 4724, B23Q 118, G02B 2126, H01L 2168

Patent

active

049483307

ABSTRACT:
An alignment stage device comprising first and second stages supported on a base and movable in those directions which are perpendicular to each other on a horizontal plane, and a third stage provided with stands on which a workpiece is mounted, and movable relative to each of the stages, wherein when the first stage is moved, the second and third stages are moved together with the first stage and when the second stage is moved, the third stage is moved together with the second stage and wherein the first and second stages are square frames each having center opening and the second stage is arranged in the center opening of the first stage while the third stage is arranged in the center opening of the second stage.

REFERENCES:
patent: 3466514 (1969-09-01), Brunner et al.
patent: 3508806 (1970-04-01), Hall
patent: 3652146 (1972-03-01), George
patent: 3829978 (1974-08-01), Basin et al.
patent: 3918167 (1975-11-01), Gerber
patent: 4193317 (1980-03-01), Oono et al.
patent: 4248498 (1981-02-01), Georges
patent: 4457664 (1984-07-01), Judell et al.
patent: 4609264 (1986-09-01), Poduin et al.
patent: 4667415 (1987-05-01), Barsky
patent: 4770600 (1988-09-01), Ishikawa

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