Alignment stage apparatus, exposure apparatus, and...

Details Alignment stage apparatus, exposure apparatus, and... Alignment stage apparatus, exposure apparatus, and...

2007-07-17

2007-07-17

Duda, Rina (Department: 2837)

Electricity: motive power systems

Linear-movement motors

C318S687000, C318S038000, C355S072000, C355S075000

Reexamination Certificate

active

10924977

ABSTRACT:
An alignment stage apparatus including a vacuum chamber, a linear motor including a plurality of coils to drive a stage, a coil selector which selectively energizes the plurality of coils, and a storage box arranged to store the coil selector. The interior of the storage box is connected to the outside of the vacuum chamber. The linear motor and the storage box are arranged in the vacuum chamber.

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