Alignment stage apparatus

Details Alignment stage apparatus Alignment stage apparatus

2007-04-03

2007-04-03

Mullins, Burton (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C318S135000, C318S687000, C310S017000

Reexamination Certificate

active

11443377

ABSTRACT:
An alignment stage apparatus includes a base structure and a movable stage which can move along a surface of the base structure so as not to be in contact with the base structure. The apparatus includes a plurality of power transmission coils buried under the surface of the base structure, a power reception coil attached to the movable stage to oppose the surface, a switching device for sequentially switching, of the plurality of power transmission coils, those that are to be energized to feed power in accordance with a position of the movable stage, and a power feeding device for supplying AC power to the power transmission coils to be energized through the switching device.

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