Alignment stage apparatus

Details Alignment stage apparatus Alignment stage apparatus

2006-08-01

2006-08-01

Mullins, Burton (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C310S017000, C318S135000

Reexamination Certificate

active

07084534

ABSTRACT:
An alignment stage apparatus including a base structure and a movable stage, which can move along a surface of the base structure so as not to be in contact with the base structure. The apparatus includes a plurality of power transmission coils buried under the surface of the base structure, a power reception coil attached to the movable stage to oppose the surface, a switch unit configured to sequentially switch, of the plurality of power transmission coils, those that are to be energized to feed power in accordance with a position of the movable stage, and a power feed unit configured to supply AC power to the power transmission coils to be energized through the switch unit. The power reception coil includes a plurality of power reception coils arrayed in a driving direction of the movable stage, and the power reception coils and power transmission coils are phase-shifted from each other by 180°
where n is the number of power reception coils arrayed in the driving direction of the movable stage.

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